Lab ME | MEMS | Semiconductor technology

Else Kooi Lab, Campus Delft University of Technology

Else Kooi Laboratory (EKL) is part of the Faculty of Electrical Engineering, Mathematics and Computer Science of Delft University of Technology (TU Delft).

EKL aims to provide micro fabrication capabilities that facilitate (sub)micro-fabrication oriented Research& Science, enable customers to test out concepts that may lead to innovative products (up to and including small scale production)

EKL is particularly interesting for companies that are active in semiconductor technology or for companies that want to investigate what semiconductor technology can do for them.

Non-TU Delft users can get  access to the lab after discussion of the terms of access.

EKL distinguishes various services:

  • Self service (the external party uses the laboratories and equipment himself),
  • Foundry services (EKL does the processing (for prototyping and small scale production) for the external party and
  • Joint Development Services (the external party uses the EKL expertise to do process research, development and manufacturing.

EKL offers start-ups, existing companies and other organisations inside and outside the Netherlands the possibility of using/ renting various state-of-the-art laboratories and equipment:

  • Integrated Circuits processing Lab (ISO class 5)
  • Special Applications (SA) & Micro-Electro-Mechanical Systems (MEMS) Labs
  • Electrical Characterisation Lab
  • (Sub)mm-wave Lab
  • Large Signal Lab
  • Solar Cell Lab
  • Cleanrooms

EKL also offers the possibility to use available, high quality equipment, including for:

  • Bonding en Packaging
  • Deposition of materials
  • Lithography up to 500 nm
  • Plasma Etching
  • Epitaxy and ion implantation

ELK works closely with the various faculties of Delft University of Technology and with other sectors, such as the pharmaceutical industry.
The collaboration with the hDMT (human organ and disease model technologies) a good example of this.
Companies that use ELK’s laboratories, clean rooms and other facilities benefit from the knowledge and skills that these collaborations generate.

Process flows can be transferred by EKL to industrial partners for larger scale production.
EKL has a strategic partnership with Philips Innovation Services (PINS) in Eindhoven.

EKL is located on the campus of the TU Delft. The campus of the TU Delft houses almost all research institutes and laboratories of the University; these are within walking distance of EKL

Each day some 27,000 people are accommodated on the Campus: students, scientists, visitors and staff from the university and companies located on the Campus. With an area of over 161 hectares, the Campus is one of the largest university campuses in the world.

The campus is very accessible along the A13 (The Hague – Rotterdam) at 10 minutes drive from Delft Central Station .

Offered Spaces:
  • Cleanroom
  • Laboratory
  • Pilot plant
  • Test Facility

  • Available for joint R&D
  • Flexible rent

Type of lab:
  • ME | MEMS
  • Nanotechnology
  • Other

Cleanroom classification:
  • ISO Class 7 (FED STD: 10.000)
  • ISO Class 5 (FED STD: 100)

Additional spaces:
  • Chemical storage
  • Meeting rooms
  • Office spaces

Additional services:
  • Reception desk services
  • Restaurant
  • Security services

Nearest Dutch airport:
  • Rotterdam The Hague Airport

Distance to nearest Dutch airport:
  • 0 to 10 km

Distance to amsterdam airport schiphol:
  • 25 to 50 km


+31(0)180 321 820 (choose 3)

CoC number: 243.67.090
BTW: NL8135.44.907.B01



Sign up for the LabForRent newsletters